A flat type touch probe sensor using PZT thin film vibrator

Takefumi Kanda, T. Morita, M. K. Kurosawa, T. Higuchi

Research output: Contribution to journalArticle

57 Citations (Scopus)

Abstract

We fabricated a touch probe sensor, having a flat configuration and using a PZT thin film vibrator. This sensor is intended for use in high-precision surface shape measuring tools at low contact force, for example, scanning probe microscopes (SPMs). The sensor consists of an oscillator vibrating in the longitudinal direction. According to our calculations higher sensitivity can be obtained by using longitudinal vibration than by using bending vibration. The vibration was excited and detected by a hydrothermally deposited PZT thin film device. The length of the vibrator was 9.8 mm, and its resonance frequency was 304.35 kHz. When the driving voltage was 3 Vp-p at the resonance frequency, the vibration amplitude at the tip of the sensor was 126 nmo-p. We used the flat configuration and miniaturized the oscillator to increase the quantity ratio of piezo film in comparison to the base material, thus improving the sensitivity. The sensitivity and the resolution were evaluated experimentally, with the vertical resolution estimated to be 2.4 nm. This sensor device will be effective for use in high-speed and high-resolution surface shape measuring tools without damage to nano scale construction.

Original languageEnglish
Pages (from-to)67-75
Number of pages9
JournalSensors and Actuators, A: Physical
Volume83
Issue number1
DOIs
Publication statusPublished - May 22 2000
Externally publishedYes

Fingerprint

Vibrators
touch
Thin films
probes
sensors
Sensors
thin films
vibration
sensitivity
oscillators
Thin film devices
bending vibration
configurations
Vibrations (mechanical)
Microscopes
microscopes
high speed
damage
Scanning
scanning

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

A flat type touch probe sensor using PZT thin film vibrator. / Kanda, Takefumi; Morita, T.; Kurosawa, M. K.; Higuchi, T.

In: Sensors and Actuators, A: Physical, Vol. 83, No. 1, 22.05.2000, p. 67-75.

Research output: Contribution to journalArticle

Kanda, Takefumi ; Morita, T. ; Kurosawa, M. K. ; Higuchi, T. / A flat type touch probe sensor using PZT thin film vibrator. In: Sensors and Actuators, A: Physical. 2000 ; Vol. 83, No. 1. pp. 67-75.
@article{419bdf5dd61343cea15a58ffb2a375bd,
title = "A flat type touch probe sensor using PZT thin film vibrator",
abstract = "We fabricated a touch probe sensor, having a flat configuration and using a PZT thin film vibrator. This sensor is intended for use in high-precision surface shape measuring tools at low contact force, for example, scanning probe microscopes (SPMs). The sensor consists of an oscillator vibrating in the longitudinal direction. According to our calculations higher sensitivity can be obtained by using longitudinal vibration than by using bending vibration. The vibration was excited and detected by a hydrothermally deposited PZT thin film device. The length of the vibrator was 9.8 mm, and its resonance frequency was 304.35 kHz. When the driving voltage was 3 Vp-p at the resonance frequency, the vibration amplitude at the tip of the sensor was 126 nmo-p. We used the flat configuration and miniaturized the oscillator to increase the quantity ratio of piezo film in comparison to the base material, thus improving the sensitivity. The sensitivity and the resolution were evaluated experimentally, with the vertical resolution estimated to be 2.4 nm. This sensor device will be effective for use in high-speed and high-resolution surface shape measuring tools without damage to nano scale construction.",
author = "Takefumi Kanda and T. Morita and Kurosawa, {M. K.} and T. Higuchi",
year = "2000",
month = "5",
day = "22",
doi = "10.1016/S0924-4247(00)00298-3",
language = "English",
volume = "83",
pages = "67--75",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "1",

}

TY - JOUR

T1 - A flat type touch probe sensor using PZT thin film vibrator

AU - Kanda, Takefumi

AU - Morita, T.

AU - Kurosawa, M. K.

AU - Higuchi, T.

PY - 2000/5/22

Y1 - 2000/5/22

N2 - We fabricated a touch probe sensor, having a flat configuration and using a PZT thin film vibrator. This sensor is intended for use in high-precision surface shape measuring tools at low contact force, for example, scanning probe microscopes (SPMs). The sensor consists of an oscillator vibrating in the longitudinal direction. According to our calculations higher sensitivity can be obtained by using longitudinal vibration than by using bending vibration. The vibration was excited and detected by a hydrothermally deposited PZT thin film device. The length of the vibrator was 9.8 mm, and its resonance frequency was 304.35 kHz. When the driving voltage was 3 Vp-p at the resonance frequency, the vibration amplitude at the tip of the sensor was 126 nmo-p. We used the flat configuration and miniaturized the oscillator to increase the quantity ratio of piezo film in comparison to the base material, thus improving the sensitivity. The sensitivity and the resolution were evaluated experimentally, with the vertical resolution estimated to be 2.4 nm. This sensor device will be effective for use in high-speed and high-resolution surface shape measuring tools without damage to nano scale construction.

AB - We fabricated a touch probe sensor, having a flat configuration and using a PZT thin film vibrator. This sensor is intended for use in high-precision surface shape measuring tools at low contact force, for example, scanning probe microscopes (SPMs). The sensor consists of an oscillator vibrating in the longitudinal direction. According to our calculations higher sensitivity can be obtained by using longitudinal vibration than by using bending vibration. The vibration was excited and detected by a hydrothermally deposited PZT thin film device. The length of the vibrator was 9.8 mm, and its resonance frequency was 304.35 kHz. When the driving voltage was 3 Vp-p at the resonance frequency, the vibration amplitude at the tip of the sensor was 126 nmo-p. We used the flat configuration and miniaturized the oscillator to increase the quantity ratio of piezo film in comparison to the base material, thus improving the sensitivity. The sensitivity and the resolution were evaluated experimentally, with the vertical resolution estimated to be 2.4 nm. This sensor device will be effective for use in high-speed and high-resolution surface shape measuring tools without damage to nano scale construction.

UR - http://www.scopus.com/inward/record.url?scp=0033740635&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033740635&partnerID=8YFLogxK

U2 - 10.1016/S0924-4247(00)00298-3

DO - 10.1016/S0924-4247(00)00298-3

M3 - Article

VL - 83

SP - 67

EP - 75

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

IS - 1

ER -