This paper discusses a dead-time compensation method for high-frequency pulse-width modulation (PWM) inverters. Feedback-type dead-time compensation can eliminate error in the inverter output voltage. With next-generation switching devices using SiC, the switching frequency of inverters is expected to improve to 10-fold that of conventional inverters. However, as switching frequency increases, dead time will more strongly affect output voltage error. This paper proposes a new compensation method, which can reduce the minimum output pulse width and the phase delay of the inverter output voltage. An experimental system was constructed and tested, using highspeed power MOSFETs and a field-programmable gate array controller. Experimental results support the validity and usefulness of the proposed compensation method.