A cylindrical micro-ultrasonic motor using micromachined bulk piezoelectric vibrator with glass case

Takefumi Kanda, Akira Makino, Yoshitaka Oomori, Koichi Suzumori

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

A cylindrical piezoelectric vibrator 0.8 mm in diameter was fabricated by micromachining. In this paper, a micro ultrasonic motor 1.8mm in casing diameter that uses this micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the piezoelectric vibrator, a glass case, a bearing, and a rotor. The vibration velocity of the cylindrical vibrator was 715mm/s when the driving frequency was 69kHz and the driving voltage was 40Vp-p. Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator, and the motor has a simple structure. In addition, the vibrator and rotor were supported by glass case. As the case was made of glass, a suitable vibration mode of the driving of the motor was obtained. We have fabricated and evaluated the cylindrically shaped traveling micro-ultrasonic motor using this vibrator.

Original languageEnglish
Pages (from-to)4764-4769
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number5 B
DOIs
Publication statusPublished - May 25 2006

Keywords

  • Bulk piezoelectric material
  • Cylindrical vibrator
  • Micromotor
  • PZT
  • Piezoelectric vibrator
  • Ultrasonic motor

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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