Abstract
A cylindrical piezoelectric vibrator 0.8 mm in diameter was fabricated by micromachining. In this paper, a micro ultrasonic motor 1.8mm in casing diameter that uses this micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the piezoelectric vibrator, a glass case, a bearing, and a rotor. The vibration velocity of the cylindrical vibrator was 715mm/s when the driving frequency was 69kHz and the driving voltage was 40Vp-p. Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator, and the motor has a simple structure. In addition, the vibrator and rotor were supported by glass case. As the case was made of glass, a suitable vibration mode of the driving of the motor was obtained. We have fabricated and evaluated the cylindrically shaped traveling micro-ultrasonic motor using this vibrator.
| Original language | English |
|---|---|
| Pages (from-to) | 4764-4769 |
| Number of pages | 6 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 45 |
| Issue number | 5 B |
| DOIs | |
| Publication status | Published - May 25 2006 |
Keywords
- Bulk piezoelectric material
- Cylindrical vibrator
- Micromotor
- PZT
- Piezoelectric vibrator
- Ultrasonic motor
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)