TY - GEN
T1 - A cylindrical micro ultrasonic motor using micro-machined piezoelectric vibrator
AU - Kanda, Takefumi
AU - Makino, Akira
AU - Oomori, Yoshitaka
AU - Suzumori, Koichi
PY - 2005
Y1 - 2005
N2 - In this paper, a micro ultrasonic motor using micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the vibrator, a glass case and a rotor. The diameter of the piezoelectric vibrator was 0.8 mm and that of the motor case was 1.8 mm, Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator and the structure of the motor was not complicated. In addition, the vibrator and rotor were supported by glass case. This is important for micro ultrasonic motor because it is difficult to support the vibrator when the vibrator was miniaturized. We have fabricated and evaluated the cylindrical shaped traveling type micro ultrasonic motor using this vibrator.
AB - In this paper, a micro ultrasonic motor using micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the vibrator, a glass case and a rotor. The diameter of the piezoelectric vibrator was 0.8 mm and that of the motor case was 1.8 mm, Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator and the structure of the motor was not complicated. In addition, the vibrator and rotor were supported by glass case. This is important for micro ultrasonic motor because it is difficult to support the vibrator when the vibrator was miniaturized. We have fabricated and evaluated the cylindrical shaped traveling type micro ultrasonic motor using this vibrator.
KW - Bulk piezoelectric material
KW - Micro motor
KW - Piezoelectric vibrator
KW - Ultrasonic motor
UR - http://www.scopus.com/inward/record.url?scp=27544447538&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=27544447538&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2005.1496518
DO - 10.1109/SENSOR.2005.1496518
M3 - Conference contribution
AN - SCOPUS:27544447538
SN - 0780389948
SN - 9780780389946
T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
SP - 721
EP - 724
BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Y2 - 5 June 2005 through 9 June 2005
ER -