A cylindrical micro ultrasonic motor using micro-machined piezoelectric vibrator

Takefumi Kanda, Akira Makino, Yoshitaka Oomori, Koichi Suzumori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, a micro ultrasonic motor using micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the vibrator, a glass case and a rotor. The diameter of the piezoelectric vibrator was 0.8 mm and that of the motor case was 1.8 mm, Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator and the structure of the motor was not complicated. In addition, the vibrator and rotor were supported by glass case. This is important for micro ultrasonic motor because it is difficult to support the vibrator when the vibrator was miniaturized. We have fabricated and evaluated the cylindrical shaped traveling type micro ultrasonic motor using this vibrator.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages721-724
Number of pages4
DOIs
Publication statusPublished - Nov 9 2005
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: Jun 5 2005Jun 9 2005

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume1

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period6/5/056/9/05

Keywords

  • Bulk piezoelectric material
  • Micro motor
  • Piezoelectric vibrator
  • Ultrasonic motor

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Kanda, T., Makino, A., Oomori, Y., & Suzumori, K. (2005). A cylindrical micro ultrasonic motor using micro-machined piezoelectric vibrator. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 721-724). [2E4.67] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1). https://doi.org/10.1109/SENSOR.2005.1496518