A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer

Takefumi Kanda, A. Makino, K. Suzumori, T. Morita, M. K. Kurosawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

18 Citations (Scopus)

Abstract

In this paper, micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. Cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. We have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and height of 5.9 mm using the stator transducer. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.

Original languageEnglish
Title of host publicationProceedings - IEEE Ultrasonics Symposium
EditorsM.P. Yuhas
Pages1298-1301
Number of pages4
Volume2
DOIs
Publication statusPublished - 2004
Event2004 IEEE Ultrasonics Symposium - Montreal, Que., Canada
Duration: Aug 23 2004Aug 27 2004

Other

Other2004 IEEE Ultrasonics Symposium
CountryCanada
CityMontreal, Que.
Period8/23/048/27/04

Fingerprint

Piezoelectric transducers
Ultrasonics
Stators
Transducers

Keywords

  • Bulk piezoelectric material
  • Micro machining
  • Micromotor
  • Piezoelectric actuator
  • Ultrasonicmotor

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Kanda, T., Makino, A., Suzumori, K., Morita, T., & Kurosawa, M. K. (2004). A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer. In M. P. Yuhas (Ed.), Proceedings - IEEE Ultrasonics Symposium (Vol. 2, pp. 1298-1301). [U4-K-1] https://doi.org/10.1109/ULTSYM.2004.1418028

A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer. / Kanda, Takefumi; Makino, A.; Suzumori, K.; Morita, T.; Kurosawa, M. K.

Proceedings - IEEE Ultrasonics Symposium. ed. / M.P. Yuhas. Vol. 2 2004. p. 1298-1301 U4-K-1.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kanda, T, Makino, A, Suzumori, K, Morita, T & Kurosawa, MK 2004, A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer. in MP Yuhas (ed.), Proceedings - IEEE Ultrasonics Symposium. vol. 2, U4-K-1, pp. 1298-1301, 2004 IEEE Ultrasonics Symposium, Montreal, Que., Canada, 8/23/04. https://doi.org/10.1109/ULTSYM.2004.1418028
Kanda T, Makino A, Suzumori K, Morita T, Kurosawa MK. A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer. In Yuhas MP, editor, Proceedings - IEEE Ultrasonics Symposium. Vol. 2. 2004. p. 1298-1301. U4-K-1 https://doi.org/10.1109/ULTSYM.2004.1418028
Kanda, Takefumi ; Makino, A. ; Suzumori, K. ; Morita, T. ; Kurosawa, M. K. / A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer. Proceedings - IEEE Ultrasonics Symposium. editor / M.P. Yuhas. Vol. 2 2004. pp. 1298-1301
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