A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer

T. Kanda, A. Makino, K. Suzumori, T. Morita, M. K. Kurosawa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

19 Citations (Scopus)

Abstract

In this paper, micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. Cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. We have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and height of 5.9 mm using the stator transducer. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.

Original languageEnglish
Title of host publicationProceedings - 2004 IEEE Ultrasonics Symposium
Subtitle of host publicationA Conference of the IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Society, UFFC-S
EditorsM.P. Yuhas
Pages1298-1301
Number of pages4
DOIs
Publication statusPublished - Dec 1 2004
Event2004 IEEE Ultrasonics Symposium - Montreal, Que., Canada
Duration: Aug 23 2004 → Aug 27 2004

Publication series

NameProceedings - IEEE Ultrasonics Symposium
Volume2
ISSN (Print)1051-0117

Other

Other2004 IEEE Ultrasonics Symposium
CountryCanada
CityMontreal, Que.
Period8/23/04 → 8/27/04

Keywords

  • Bulk piezoelectric material
  • Micro machining
  • Micromotor
  • Piezoelectric actuator
  • Ultrasonicmotor

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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