A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer

T. Kanda; A. Makino; K. Suzumori; T. Morita; M. K. Kurosawa

doi:10.1109/ULTSYM.2004.1418028

A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer

T. Kanda, A. Makino, K. Suzumori, T. Morita, M. K. Kurosawa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

18 Citations (Scopus)

Abstract

In this paper, micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. Cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. We have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and height of 5.9 mm using the stator transducer. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.

Original language	English
Title of host publication	Proceedings - 2004 IEEE Ultrasonics Symposium
Subtitle of host publication	A Conference of the IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Society, UFFC-S
Editors	M.P. Yuhas
Pages	1298-1301
Number of pages	4
DOIs	https://doi.org/10.1109/ULTSYM.2004.1418028
Publication status	Published - Dec 1 2004
Event	2004 IEEE Ultrasonics Symposium - Montreal, Que., Canada Duration: Aug 23 2004 → Aug 27 2004

Publication series

Name	Proceedings - IEEE Ultrasonics Symposium
Volume	2
ISSN (Print)	1051-0117

Other

Other	2004 IEEE Ultrasonics Symposium
Country	Canada
City	Montreal, Que.
Period	8/23/04 → 8/27/04

Keywords

Bulk piezoelectric material
Micro machining
Micromotor
Piezoelectric actuator
Ultrasonicmotor

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2004.1418028

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Cite this

Kanda, T., Makino, A., Suzumori, K., Morita, T., & Kurosawa, M. K. (2004). A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer. In M. P. Yuhas (Ed.), Proceedings - 2004 IEEE Ultrasonics Symposium: A Conference of the IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Society, UFFC-S (pp. 1298-1301). [U4-K-1] (Proceedings - IEEE Ultrasonics Symposium; Vol. 2). https://doi.org/10.1109/ULTSYM.2004.1418028

A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer. / Kanda, T.; Makino, A.; Suzumori, K.; Morita, T.; Kurosawa, M. K.

Proceedings - 2004 IEEE Ultrasonics Symposium: A Conference of the IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Society, UFFC-S. ed. / M.P. Yuhas. 2004. p. 1298-1301 U4-K-1 (Proceedings - IEEE Ultrasonics Symposium; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kanda, T, Makino, A, Suzumori, K, Morita, T & Kurosawa, MK 2004, A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer. in MP Yuhas (ed.), Proceedings - 2004 IEEE Ultrasonics Symposium: A Conference of the IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Society, UFFC-S., U4-K-1, Proceedings - IEEE Ultrasonics Symposium, vol. 2, pp. 1298-1301, 2004 IEEE Ultrasonics Symposium, Montreal, Que., Canada, 8/23/04. https://doi.org/10.1109/ULTSYM.2004.1418028

Kanda T, Makino A, Suzumori K, Morita T, Kurosawa MK. A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer. In Yuhas MP, editor, Proceedings - 2004 IEEE Ultrasonics Symposium: A Conference of the IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Society, UFFC-S. 2004. p. 1298-1301. U4-K-1. (Proceedings - IEEE Ultrasonics Symposium). https://doi.org/10.1109/ULTSYM.2004.1418028

Kanda, T. ; Makino, A. ; Suzumori, K. ; Morita, T. ; Kurosawa, M. K. / A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer. Proceedings - 2004 IEEE Ultrasonics Symposium: A Conference of the IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Society, UFFC-S. editor / M.P. Yuhas. 2004. pp. 1298-1301 (Proceedings - IEEE Ultrasonics Symposium).

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