Abstract
In this paper, micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. Cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. We have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and height of 5.9 mm using the stator transducer. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.
| Original language | English |
|---|---|
| Title of host publication | Proceedings - IEEE Ultrasonics Symposium |
| Editors | M.P. Yuhas |
| Pages | 1298-1301 |
| Number of pages | 4 |
| Volume | 2 |
| DOIs | |
| Publication status | Published - 2004 |
| Event | 2004 IEEE Ultrasonics Symposium - Montreal, Que., Canada Duration: Aug 23 2004 → Aug 27 2004 |
Other
| Other | 2004 IEEE Ultrasonics Symposium |
|---|---|
| Country | Canada |
| City | Montreal, Que. |
| Period | 8/23/04 → 8/27/04 |
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Keywords
- Bulk piezoelectric material
- Micro machining
- Micromotor
- Piezoelectric actuator
- Ultrasonicmotor
ASJC Scopus subject areas
- Engineering(all)
Cite this
A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer. / Kanda, Takefumi; Makino, A.; Suzumori, K.; Morita, T.; Kurosawa, M. K.
Proceedings - IEEE Ultrasonics Symposium. ed. / M.P. Yuhas. Vol. 2 2004. p. 1298-1301 U4-K-1.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer
AU - Kanda, Takefumi
AU - Makino, A.
AU - Suzumori, K.
AU - Morita, T.
AU - Kurosawa, M. K.
PY - 2004
Y1 - 2004
N2 - In this paper, micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. Cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. We have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and height of 5.9 mm using the stator transducer. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.
AB - In this paper, micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. Cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. We have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and height of 5.9 mm using the stator transducer. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.
KW - Bulk piezoelectric material
KW - Micro machining
KW - Micromotor
KW - Piezoelectric actuator
KW - Ultrasonicmotor
UR - http://www.scopus.com/inward/record.url?scp=21644459403&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=21644459403&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2004.1418028
DO - 10.1109/ULTSYM.2004.1418028
M3 - Conference contribution
AN - SCOPUS:21644459403
SN - 0780384121
VL - 2
SP - 1298
EP - 1301
BT - Proceedings - IEEE Ultrasonics Symposium
A2 - Yuhas, M.P.
ER -