TY - GEN
T1 - A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer
AU - Kanda, T.
AU - Makino, A.
AU - Suzumori, K.
AU - Morita, T.
AU - Kurosawa, M. K.
PY - 2004/12/1
Y1 - 2004/12/1
N2 - In this paper, micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. Cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. We have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and height of 5.9 mm using the stator transducer. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.
AB - In this paper, micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. Cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. We have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and height of 5.9 mm using the stator transducer. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.
KW - Bulk piezoelectric material
KW - Micro machining
KW - Micromotor
KW - Piezoelectric actuator
KW - Ultrasonicmotor
UR - http://www.scopus.com/inward/record.url?scp=21644459403&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=21644459403&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2004.1418028
DO - 10.1109/ULTSYM.2004.1418028
M3 - Conference contribution
AN - SCOPUS:21644459403
SN - 0780384121
T3 - Proceedings - IEEE Ultrasonics Symposium
SP - 1298
EP - 1301
BT - Proceedings - 2004 IEEE Ultrasonics Symposium
A2 - Yuhas, M.P.
T2 - 2004 IEEE Ultrasonics Symposium
Y2 - 23 August 2004 through 27 August 2004
ER -