5-nm-Order electron-beam lithography for nanodevice fabrication

Kenji Yamazaki, Hideo Namatsu

Research output: Contribution to journalArticlepeer-review

42 Citations (Scopus)

Fingerprint

Dive into the research topics of '5-nm-Order electron-beam lithography for nanodevice fabrication'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy