Original language | Japanese |
---|---|
Pages (from-to) | 224-227 |
Number of pages | 4 |
Journal | 真空 |
Volume | 38 |
Issue number | 3 |
Publication status | Published - 1995 |
負イオン注入における基板帯電モデルとその評価
Research output: Contribution to journal › Article
Research output: Contribution to journal › Article
Original language | Japanese |
---|---|
Pages (from-to) | 224-227 |
Number of pages | 4 |
Journal | 真空 |
Volume | 38 |
Issue number | 3 |
Publication status | Published - 1995 |