| Original language | Japanese |
|---|---|
| Pages (from-to) | 224-227 |
| Number of pages | 4 |
| Journal | 真空 |
| Volume | 38 |
| Issue number | 3 |
| Publication status | Published - 1995 |
負イオン注入における基板帯電モデルとその評価
Research output: Contribution to journal › Article
Research output: Contribution to journal › Article
| Original language | Japanese |
|---|---|
| Pages (from-to) | 224-227 |
| Number of pages | 4 |
| Journal | 真空 |
| Volume | 38 |
| Issue number | 3 |
| Publication status | Published - 1995 |