枚葉式半導体洗浄機モデル内渦構造のPIV計測

Research output: Contribution to journalArticle

Original languageJapanese
Journal日本機械学会論文集
Volume809
Issue number815
Publication statusPublished - 2014

Cite this

枚葉式半導体洗浄機モデル内渦構造のPIV計測. / Yanase, Shinichirou.

In: 日本機械学会論文集, Vol. 809, No. 815, 2014.

Research output: Contribution to journalArticle

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title = "枚葉式半導体洗浄機モデル内渦構造のPIV計測",
author = "Shinichirou Yanase",
year = "2014",
language = "Japanese",
volume = "809",
journal = "日本機械学会論文集",
number = "815",

}

TY - JOUR

T1 - 枚葉式半導体洗浄機モデル内渦構造のPIV計測

AU - Yanase, Shinichirou

PY - 2014

Y1 - 2014

M3 - Article

VL - 809

JO - 日本機械学会論文集

JF - 日本機械学会論文集

IS - 815

ER -