枚葉式半導体洗浄機モデル内渦構造の PIV 計測

Research output: Contribution to journalArticle

Original languageJapanese
Pages (from-to)FE0197-FE0197
Number of pages1
Journal日本機械学会論文集
Volume80
Issue number815
Publication statusPublished - 2014

Cite this

枚葉式半導体洗浄機モデル内渦構造の PIV 計測. / Kouchi, Toshinori.

In: 日本機械学会論文集, Vol. 80, No. 815, 2014, p. FE0197-FE0197.

Research output: Contribution to journalArticle

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year = "2014",
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volume = "80",
pages = "FE0197--FE0197",
journal = "日本機械学会論文集",
number = "815",

}

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T1 - 枚葉式半導体洗浄機モデル内渦構造の PIV 計測

AU - Kouchi, Toshinori

PY - 2014

Y1 - 2014

M3 - Article

VL - 80

SP - FE0197-FE0197

JO - 日本機械学会論文集

JF - 日本機械学会論文集

IS - 815

ER -