| Original language | Japanese |
|---|---|
| Pages (from-to) | 158-163 |
| Number of pages | 6 |
| Journal | 砥粒加工学会誌 |
| Volume | Vol.52 |
| Issue number | issue 3 |
| Publication status | Published - 2008 |
吸引キャビテーション援用砥粒加工を用いたマイクロパターニング
Research output: Contribution to journal › Article
Research output: Contribution to journal › Article
| Original language | Japanese |
|---|---|
| Pages (from-to) | 158-163 |
| Number of pages | 6 |
| Journal | 砥粒加工学会誌 |
| Volume | Vol.52 |
| Issue number | issue 3 |
| Publication status | Published - 2008 |