単結晶シリコンの放電加工(共著)

Research output: Contribution to journalArticle

Original languageJapanese
Pages (from-to)1739-1742
Number of pages4
Journal精密工学会誌
Volume64
Issue number12
Publication statusPublished - 1998

Cite this

単結晶シリコンの放電加工(共著). / Okamoto, Yasuhiro.

In: 精密工学会誌, Vol. 64, No. 12, 1998, p. 1739-1742.

Research output: Contribution to journalArticle

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title = "単結晶シリコンの放電加工(共著)",
author = "Yasuhiro Okamoto",
year = "1998",
language = "Japanese",
volume = "64",
pages = "1739--1742",
journal = "精密工学会誌",
number = "12",

}

TY - JOUR

T1 - 単結晶シリコンの放電加工(共著)

AU - Okamoto, Yasuhiro

PY - 1998

Y1 - 1998

M3 - Article

VL - 64

SP - 1739

EP - 1742

JO - 精密工学会誌

JF - 精密工学会誌

IS - 12

ER -