単結晶シリコンの放電加工(共著)

Research output: Contribution to journalArticle

Original languageJapanese
Pages (from-to)1739-1742
Number of pages4
Journal精密工学会誌
Volume64
Issue number12
Publication statusPublished - 1998

Cite this

単結晶シリコンの放電加工(共著). / Okada, Akira.

In: 精密工学会誌, Vol. 64, No. 12, 1998, p. 1739-1742.

Research output: Contribution to journalArticle

Okada, Akira. / 単結晶シリコンの放電加工(共著). In: 精密工学会誌. 1998 ; Vol. 64, No. 12. pp. 1739-1742.
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