Original language | Japanese |
---|---|
Pages (from-to) | 9-16 |
Number of pages | 8 |
Journal | 電気加工学会誌 |
Volume | 30 |
Issue number | 65 |
Publication status | Published - 1996 |
単結晶シリコンの微細穴放電加工に関する研究(共著)
Research output: Contribution to journal › Article
Research output: Contribution to journal › Article
Original language | Japanese |
---|---|
Pages (from-to) | 9-16 |
Number of pages | 8 |
Journal | 電気加工学会誌 |
Volume | 30 |
Issue number | 65 |
Publication status | Published - 1996 |