| Original language | Japanese |
|---|---|
| Pages (from-to) | 9-16 |
| Number of pages | 8 |
| Journal | 電気加工学会誌 |
| Volume | 30 |
| Issue number | 65 |
| Publication status | Published - 1996 |
単結晶シリコンの微細穴放電加工に関する研究(共著)
Research output: Contribution to journal › Article
Research output: Contribution to journal › Article
| Original language | Japanese |
|---|---|
| Pages (from-to) | 9-16 |
| Number of pages | 8 |
| Journal | 電気加工学会誌 |
| Volume | 30 |
| Issue number | 65 |
| Publication status | Published - 1996 |