フィードバック誤差学習を用いた位置決めステージに対するオートチューニングの改善

This paper considers the automatic parameter tuning for the position control of the linear stage. To improve the performance of the positioning, feedback error learning (FEL), which reduces the output of the feedback controller for the learning, is utilized. Effects of the FEL's parameters (i.e., the reference, the gain of the feedback controller, the learning rate, and the parameter of the feedforward controller) are investigated by experiment. The large amplitude of the reference is effective in terms of the learning accuracy, and the large parameter of the feedforward controller is effective in terms of the learning time. The suitable learning rate and the feedback controller's gain are selected by considering the oscillation of estimated parameters. Furthermore, to shorten the learning time and improve the positioning performance, the termination test of the FEL is presented. In this method, the learning is automatically stopped based on the change of time integral of the estimated vector. Experimental results demonstrate the improvement of the parameter tuning.