• 704 Citations
  • 12 h-Index
1989 …2019
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Research Output 1989 2019

  • 704 Citations
  • 12 h-Index
  • 48 Article
  • 22 Conference contribution
  • 1 Chapter
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Conference contribution
2018

Intentionally encapsulated metal alloys within vertically aligned multi-walled carbon nanotube array via chemical vapor deposition technique

Inoue, H., Nishikawa, T., Hayashi, Y., Hada, M., Tokunaga, T., Amaratunga, G. A. J. & Amaratunga, G. A. J., Feb 7 2018, Conference Program Digest - 7th International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, IEEE 3M-NANO 2017. Institute of Electrical and Electronics Engineers Inc., Vol. 2018-January. p. 357-361 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Carbon Nanotubes
Chemical vapor deposition
Carbon nanotubes
Metals
carbon nanotubes

Modeling of Ablation of the Target Material for the Plasma for Coherent and Incoherent EUV Sources

Sasaki, A., Sunahara, A., Nishihara, K. & Nishikawa, T., Jan 1 2018, X-Ray Lasers 2016 - Proceedings of the 15th International Conference on X-Ray Lasers. Springer Science and Business Media, LLC, Vol. 202. p. 373-376 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

ablation
particle emission
coherent light
lasers
density distribution
2017

Synthesis of hybrid carbon nanoparticles using multi-walled carbon nanotubes and fullerene via self-assembly

Karthik, P. S., Lin, Z., Korada, V. A., Hada, M., Nishikawa, T. & Hayashi, Y., 2017, Research and Application of Functional Materials - ICSMR 2016. Trans Tech Publications Ltd, Vol. 900 MSF. p. 46-49 4 p. (Materials Science Forum; vol. 900 MSF).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fullerenes
Carbon Nanotubes
Self assembly
fullerenes
self assembly
2016

Carbon nanostructures synthesized via self-assembly (LLIP) and its application in FET

Karthik, P., Shimo, Y., Lin, Z., Venkata Krishna Rao, R., Gong, X., Yoshida, M., Hada, M., Nishikawa, T., Hayashi, Y. & Singh, S. P., Nov 28 2016, 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016. Institute of Electrical and Electronics Engineers Inc., p. 468-472 5 p. 7758292

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Field effect transistors
Nanorods
Self assembly
Nanostructures
Carbon
1 Citation (Scopus)

Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source

Sasaki, A., Nishihara, K., Sunahara, A., Furukawa, H. & Nishikawa, T., 2016, Extreme Ultraviolet (EUV) Lithography VII. SPIE, Vol. 9776. 97762C

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ultraviolet
Droplet
Laser pulses
Extremes
Plasma

Self-assembled C60 fullerene cylindrical nanotubes by LLIP method

Venkata Krishna Rao, R., Karthik, P. S., Abhinav, V. K., Lin, Z., Myint, M. T. Z., Nishikawa, T., Hada, M., Yamashita, Y., Hayashi, Y. & Singh, S. P., Nov 21 2016, 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., p. 303-306 4 p. 7751386

Research output: Chapter in Book/Report/Conference proceedingConference contribution

liquid-liquid interfaces
Fullerenes
Nanotubes
fullerenes
nanotubes
2010

Modeling of atomic and plasmas processes in the LPP and LA-DPP EUV source

Sasaki, A., Nishihara, K., Sunahara, A., Furukawa, H., Nishikawa, T. & Koike, F., 2010, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 7636. 76363D

Research output: Chapter in Book/Report/Conference proceedingConference contribution

EUV Source
Plasma
Plasmas
Modeling
Plasma sources
2009
3 Citations (Scopus)

Atomic processes in the LPP and LA-DPP EUV sources

Sasaki, A., Nishihara, K., Sunahara, A., Furukawa, H., Nishikawa, T. & Koike, F., 2009, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 7271. 727130

Research output: Chapter in Book/Report/Conference proceedingConference contribution

EUV Source
Tin
tin
Plasma
Ions
2008
8 Citations (Scopus)

Advanced laser-produced EUV light source for HVM with conversion efficiency of 5-7% and B-field mitigation of ions

Nishihara, K., Sunahara, A., Sasaki, A., Fujioka, S., Shimada, Y., Nunami, M., Tanuma, H., Murakami, M., Aota, T., Fujima, K., Furukawa, H., Nishikawa, T., Koike, F., More, R., Kato, T., Zhakhovskii, V., Gamata, K., Ueda, H., Nishimura, H., Yuba, Y. & 4 others, Nagai, K., Miyanaga, N., Izawa, Y. & Mima, K., 2008, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6921. 69210Y

Research output: Chapter in Book/Report/Conference proceedingConference contribution

debris
Debris
Conversion efficiency
Light sources
light sources
2007

Theoretical and experimental databases for high average power EUV light source by laser produced plasma

Nishimura, H., Nishihara, K., Fujioka, S., Aota, T., Ando, T., Shimomura, M., Sakaguchi, K., Simada, Y., Yamaura, M., Nagai, K., Norimatsu, T., Sunahara, A., Murakami, M., Sasaki, A., Tanuma, H., Koike, F., Fuijma, K., Suzuki, C., Morita, S., Kato, T. & 5 others, Kagawa, T., Nishikawa, T., Miyanaga, N., Izawa, Y. & Mima, K., 2007, AIP Conference Proceedings. Vol. 926. p. 270-280 11 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

laser plasmas
ultraviolet radiation
light sources
extreme ultraviolet radiation
plasma control
2006
9 Citations (Scopus)

Analysis of the emission spectrum of Xe and Sn

Sasaki, A., Nishihara, K., Sunahara, A., Nishikawa, T., Koike, F., Kagawa, K. & Tanuma, H., 2006, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6151 II. 61513W

Research output: Chapter in Book/Report/Conference proceedingConference contribution

emission spectra
Plasmas
Wavelength
plasma temperature
resonance lines
1 Citation (Scopus)

Development of EUV light source by laser-produced plasma

Izawa, Y., Miyanaga, N., Nishimura, H., Fujioka, S., Aota, T., Tao, Y., Uchida, S., Shimada, Y., Hashimoto, K., Yamaura, M., Nishihara, K., Murakami, M., Sunahara, A., Furukawa, H., Sasaki, A., Nishikawa, T., Tanuma, H., Norimatsu, T., Nagai, K., Gu, Q. & 5 others, Nakatsuka, M., Fujita, H., Tsubakimoto, K., Yoshida, H. & Mima, K., Jun 2006, Journal De Physique. IV : JP. Vol. 133. p. 1161-1165 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

laser plasmas
light sources
lithography
physics

Numerical analysis of energy transport by intense resonance line in Lithium plasmas

Nishikawa, T., Gamada, K., Sunahara, A. & Nishihara, K., Jun 2006, Journal De Physique. IV : JP. Vol. 133. p. 1185-1187 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

resonance lines
coronas
numerical analysis
lithium
emissivity
1 Citation (Scopus)

Progress in LPP EUV source development at Osaka University

Miyanaga, N., Nishimura, H., Fujioka, S., Aota, T., Uchida, S., Yamaura, M., Shimada, Y., Hashimoto, K., Nagai, K., Norimatsu, T., Nishihara, K., Murakami, M., Zhakhovskii, V., Kang, Y. G., Sunahara, A., Furukawa, H., Sasaki, A., Nishikawa, T., Nakatsuka, M., Fujita, H. & 4 others, Tsubakimoto, K., Yoshida, H., Izawa, Y. & Mima, K., 2006, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6151 I. 61511Q

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lasers
lasers
Plasmas
tin
pulse duration
2005

Estimations on high energy ions and neutral particles from LPP EUV light sources

Furukawa, H., Kawamura, T., Nishikawa, T., Sasaki, A., Fujima, K., Fujioka, S., Nishimura, H., Nishihara, K., Miyanaga, N., Izawa, Y. & Yamanaka, C., 2005, Progress in Biomedical Optics and Imaging - Proceedings of SPIE. Mackay, R. S. (ed.). II ed. Vol. 5751. p. 789-797 9 p. 93

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Light sources
Charge transfer
Ions
Laser ablation
Radiation

Modeling of the atomic processes in the laser-plasma EUV sources

Sasaki, Nishihara, K., Koike, F., Kagawa, K., Tanuma, H., Sunahara, A., Gamada, K. & Nishikawa, T., 2005, Progress in Biomedical Optics and Imaging - Proceedings of SPIE. Mackay, R. S. (ed.). II ed. Vol. 5751. p. 935-942 8 p. 115

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasmas
Wavelength
Lasers
Opacity
Satellites

Simulations on laser ablation and its applications to EUV Light Sources

Furukawa, H., Kawamura, T., Nishikawa, T., Sasaki, A., Fujima, K., Nishihara, K. & Yamanaka, C., 2005, IQEC, International Quantum Electronics Conference Proceedings. Vol. 2005. p. 1146-1147 2 p. 1561040

Research output: Chapter in Book/Report/Conference proceedingConference contribution

laser ablation
light sources
neutral particles
neutral gases
estimates
2004
6 Citations (Scopus)

Estimation of emission efficiency for laser-produced EUV-plasmas

Kawamura, T., Sunahara, A., Gamada, K., Fujima, K., Koike, F., Furukawa, H., Nishikawa, T., Sasaki, A., Kagawa, T., More, R., Kato, T., Murakami, M., Zhakhovskii, V., Tanuma, H., Fujimoto, T., Shimada, Y., Yamaura, M., Hashimoto, K., Uchida, S., Yamanaka, C. & 14 others, Okuno, T., Hibino, T., Ueda, N., Matsui, R., Tao, Y., Nakai, M., Shigemori, K., Fujioka, S., Nagai, K., Norimatsu, T., Nishimura, H., Nishihara, K., Miyanaga, N. & Izawa, Y., 2004, Proceedings of SPIE - The International Society for Optical Engineering. Mackay, R. S. (ed.). PART 2 ed. Vol. 5374. p. 918-925 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

ultraviolet radiation
Plasmas
Lasers
lasers
Laser beam effects
5 Citations (Scopus)

Simulations on laser ablation and its applications

Furukawa, H., Kawamura, T., Sunahara, A., Nishikawa, T., Nishihara, K. & Yamanaka, C., 2004, Proceedings of SPIE - The International Society for Optical Engineering. Phipps, C. R. (ed.). PART 2 ed. Vol. 5448. p. 872-884 13 p. 111

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laser ablation
laser ablation
Phase transitions
Ablation
ablation
3 Citations (Scopus)

Theoretical modeling of laser-produced plasmas for development of extreme UV radiation source for lithography

Nishihara, K., Nishikawa, T., Sasaki, A., Kawamura, T., Sunahara, A., Furukawa, H., Murakami, M., Nishimura, H., Shimada, Y., Nakai, M., Fujioka, S., Shigemori, K., Uchida, S., Fujima, K., More, R., Koike, F., Kagawa, T., Zhakhovskii, V., Hashimoto, K., Yamaura, M. & 10 others, Matsui, R., Hibino, T., Okuno, T., Tao, Y., Sohnatzadeh, F. L., Nagai, K., Norimatsu, T., Tanuma, H., Miyanaga, N. & Izawa, Y., 2004, Inertial Fusion Sciences and Applications 2003. Hammel, B. A., Meyerhofer, D. D. & Meyer-ter-Vehn, J. (eds.). p. 1069-1073 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laser produced plasmas
Ultraviolet radiation
Lithography
Light sources
Lasers
3 Citations (Scopus)

Theoretical simulation of extreme UV radiation source for lithography

Fujima, K., Nishihara, K., Kawamura, T., Furukawa, H., Kagawa, T., Koike, F., More, R., Murakami, M., Nishikawa, T., Sasaki, A., Sunahara, A., Zhakhovskii, V., Fujimoto, T. & Tanuma, H., 2004, Proceedings of SPIE - The International Society for Optical Engineering. Mackay, R. S. (ed.). PART 1 ed. Vol. 5374. p. 405-412 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

radiation sources
Ultraviolet radiation
Lithography
Conversion efficiency
lithography
2003

Progress in understanding of laser-produced plasmas for EUV source

Miyanaga, N., Fujima, K., Fujioka, S., Fujimoto, Y., Fujita, H., Furukawa, H., Hashimoto, K., Hibino, T., Kagawa, T., Kato, T., Kawamura, T., Koike, F., Matsui, R., More, R., Murakami, M., Nagai, M., Nakai, M., Nakatsuka, M., Nishikawa, T., Nishihara, K. & 16 others, Nishimura, H., Norimatsu, T., Okuno, T., Sasaki, A., Shigemori, K., Shimada, Y., Sohnatzadeh, F. L., Sunahara, A., Tanuma, H., Tao, Y., Tsubakimoto, K., Uchida, S., Yamaura, M., Yoshida, H., Zhakhovskii, V. & Izawa, Y., 2003, Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS. Vol. 1. p. 297-298 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laser produced plasmas
Lithography
Computer simulation