• 704 Citations
  • 12 h-Index
1989 …2019
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Research Output 1989 2019

  • 704 Citations
  • 12 h-Index
  • 48 Article
  • 22 Conference contribution
  • 1 Chapter
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2006
18 Citations (Scopus)

Conversion efficiency of LPP sources

Nishihara, K., Sasaki, A., Sunahara, A. & Nishikawa, T., Feb 23 2006, EUV Sources for Lithography. SPIE, p. 339-370 32 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Conversion efficiency